Vapor Pressure Data: Trichlorosilane
192.15 to 304.75
Tabulated vapor pressure vs temperature for ~2800 pure compounds (inorganic and organic). Each row gives vapor pressure in Pa at a specific temperature in Kelvin. Covers cryogenic to high-boiling-point ranges. Includes water (ice, supercooled, and liquid phases), gases, organics, metals, and inorganic salts.
| compound name | temperature K | data source table | formula | vapor pressure Pa (Pa) |
|---|---|---|---|---|
| Trichlorosilane | 192.15 | Table 6-97 | Cl3HSi | 100 |
| Trichlorosilane | 217.15 | Table 6-97 | Cl3HSi | 1,000 |
| Trichlorosilane | 252.15 | Table 6-97 | Cl3HSi | 10,000 |
| Trichlorosilane | 304.75 | Table 6-97 | Cl3HSi | 100,000 |
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